Title:
SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER
Document Type and Number:
Japanese Patent JP2003321230
Kind Code:
A
Abstract:
To provide synthetic quartz glass wherein a crack is hard to appear when irradiated with ultraviolet rays having a relatively high energy.
The synthetic quartz glass for an optical member is used in an optical apparatus having an optical source of light having a wave length of 150-200 nm. The glass is used under a pulse energy density ≥0.5 mJ/cm2/pulse or a lighting intensity <5 mW/cm2. In the glass, the concentration of hydrogen molecule is <5×1016 molecules/cm3 and, preferably, the OH group concentration is ≤100 ppm and the F concentration is ≥100 ppm.
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Inventors:
IKUTA YORISUKE
AGATA NORIYUKI
AGATA NORIYUKI
Application Number:
JP2002124435A
Publication Date:
November 11, 2003
Filing Date:
April 25, 2002
Export Citation:
Assignee:
ASAHI GLASS CO LTD
International Classes:
G02B1/00; C03B20/00; C03C3/06; C03C4/00; (IPC1-7): C03B20/00; C03C3/06; G02B1/00