PURPOSE: To early discover process abnormality and to reduce a load on a process operator by collating process measurement data with a standard pattern so as to collate positional relation between patterns.

CONSTITUTION: The system is constituted of a characteristic pick-up part 102, a collating part 103 collating the plural patterns, a comprehensive evaluation part 104 comprehensively executing evaluation and a parameter constructing part 110 constructing a parameter used by the respective parts. The collating part 104 consists of a pattern collating part 106 collating the shape of the respective patterns and a permutation collating part 107 collating the positional relation between the patterns. Then, the collation of the pattern shape and the collation of appearing order of vectors constituting the pattern in the whole patterns are executed so that the collation of the patterns being more complicated than conventional ones is more correctly executed. The knowledge of the positional relation between the patterns is also automatically constructed.