To provide a system and a method of efficiently and finely manufacture a mechanism by providing plural electrodes for generating electric fields for attracting the electric field to be generated by a first electrode so as to move the medium in relation to a fine processing structure.
A fine processing structure 21 has a movable carrier 73, an information memory medium 71 to be connected to a first surface of the movable carrier 73, a data writing chip 52, a bend part 82 for connecting the movable carrier 73 to the fine processing structure 21, parallel electrodes 88a, 88b to be connected to a second surface of the movable carrier 73, fixed electrodes 86a, 86b connected to the fine processing structure 21. A voltage pattern to be periodically and spatially alternated is applied to the electrodes 88a, 88b, and a repetitive voltage pattern to be spatially alternated is applied to the electrodes 86a, 86b. The voltage pattern applied to the electrodes 86a, 86b crosses them for step-movement in some direction. With this structure, the electrodes 88a, 88b, consequently, the movable carrier 73 and the medium 71 are pulled in a direction opposite to the step-movement direction. A system can be thereby efficiently and finely processed.
MERCHANT PAUL P
TAUSSIG CARL P
