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Patent Searching and Data


Title:
SYSTEM AND METHOD FOR MASS FLOW RATIO
Document Type and Number:
Japanese Patent JP2003263230
Kind Code:
A
Abstract:

To provide a system for dividing a single mass and flow to more than two secondary mass and flow with a predetermined ratio.

A system for dividing a single mass and flow includes an inlet designed for receiving the single mass and flow and at least two flow lines coupled to the entrance. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive desired flow ratio via a user interface, receive signals indicating measured flows from the flow meters, calculate an actual flow ratio of each flow line, based on the measured flows and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flows passing at least one of the each flow line and supply signals indicating the desired flows to at least one of the valves, if the actual ratios are not equal to the desired ratio.


Inventors:
AMBROSINA JESSE
KOTTENSTETTE NICHOLAS
SHAJII ALI
Application Number:
JP2002380308A
Publication Date:
September 19, 2003
Filing Date:
December 27, 2002
Export Citation:
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Assignee:
MKS INSTR INC
International Classes:
G01F1/68; G05D11/13; G01F1/00; (IPC1-7): G05D11/13; G01F1/00
Attorney, Agent or Firm:
Masao Okabe (10 outside)