SYSTEM AND METHOD FOR MOVING OBJECT USING PIEZOELECTRIC ACTUATOR

Title:

SYSTEM AND METHOD FOR MOVING OBJECT USING PIEZOELECTRIC ACTUATOR

Document Type and Number:

Japanese Patent JP2005185094

Kind Code:

A

Abstract:

To provide a system and a method for moving an object using a piezoelectric actuator.

The system comprises several piezoelectric actuators capable of expanding/shear deforming. The expansion and the shear-deformation are used to respond to first and second control signals for grasping and moving an object. The displacement allowed to the object is limited by the maximum shear deformation of the piezoelectric actuator. In order to increase the allowed displacement, the piezoelectric actuator is controlled to execute a linear shear deformation sequence or a shuffle sequence. The object moves during the linear shear deformation sequence while the object is almost generated during the shuffle sequence, and the piezoelectric actuator is rearranged relative to the object during that period. After that, the linear shear deformation sequence can be used to further move the object.

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Inventors:

HENDRIKS STEFAN GERTRUD M
MATTAAR THOMAS A
CATHARINA MARIA LEENHEERS GERA

Application Number:

JP2004360963A

Publication Date:

July 07, 2005

Filing Date:

December 14, 2004

Export Citation:

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Assignee:

ASML NETHERLANDS BV

International Classes:

B81B3/00; B81B7/02; G03F7/20; H01L21/027; H01L41/09; H02N2/00; (IPC1-7): H02N2/00; B81B3/00; B81B7/02; H01L21/027; H01L41/09

Attorney, Agent or Firm:

Hideto Asamura
Hajime Asamura
Toru Mori
Yukio Iwamoto

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