Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SYSTEM AND METHOD FOR USING BENT PIPE IN HIGH-PURITY FLUID HANDLING SYSTEMS
Document Type and Number:
Japanese Patent JP2003065481
Kind Code:
A
Abstract:

To provide a system and a method to use a bent pipe in high-purity fluid handling systems capable of incorporating the bent pipe in a supply line, a production line and a vacuum preliminary step line in high purity fluid handling systems without heat treatment polishing or after bending.

This new method of bending a tube suitably used in the high- purity fluid handling systems, comprises selecting the tube made of a material having at least a grain size number 5, and shaping a bend on the tube with a bending radius 1.5 times greater than a diameter of the tube.


Inventors:
ERDEI NICOLAE M
MAYS TODD A
Application Number:
JP2002134767A
Publication Date:
March 05, 2003
Filing Date:
May 10, 2002
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
THERMA CORP INC
International Classes:
F16L43/00; B01J4/00; B21D7/00; B21D9/00; B21D51/16; F16L55/00; H01L21/304; (IPC1-7): F16L43/00; B21D7/00; B21D9/00; B21D51/16; H01L21/304
Attorney, Agent or Firm:
Yoshihiro Kiyohara