Title:
SYSTEM FOR TREATING SAMPLE
Document Type and Number:
Japanese Patent JP2009111406
Kind Code:
A
Abstract:
To provide a treating system preferable for manufacturing an SOI substrate.
The treating system 3000 includes a scalar robot 3150 that holds and carries a lamination substrate with a robot hand 3152, a centering device 3070, a separating device 3020, an inverting device 3130, and a washing/drying device 3120 that are each disposed at almost equal positions from a drive shaft 3151 of the scalar robot 3150, and rotates the robot hand 3152 with the drive shaft 3152 as a center in a horizontal plane, and carries the lamination substrate and the substrate after separation between each treating device by allowing the robot hand 3152 to run away from or approach the drive shaft 3151.
Inventors:
YANAGIDA KAZUTAKA
SAKAGUCHI KIYOFUMI
OMI KAZUAKI
SAKAGUCHI KIYOFUMI
OMI KAZUAKI
Application Number:
JP2008320216A
Publication Date:
May 21, 2009
Filing Date:
December 16, 2008
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/02; H01L21/304; H01L21/677; H01L27/12
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu