Title:
モータモジュール、多軸モータ駆動アセンブリ、多軸ロボット装置、並びに、電子デバイス製造のシステム及び方法
Document Type and Number:
Japanese Patent JP6382213
Kind Code:
B2
Abstract:
Motor modules for multi-arm robot apparatus are described. The motor modules can be used individually or stacked and assembled to make up one-axis, 2-axis, 3-axis, 4-axis, 5-axis, 6-axis motor assemblies, or more. One or more of the motor modules have a stator assembly including a stator received in the stator housing, and a rotor assembly abutting the stator assembly, the rotor assembly including a rotor housing, a drive shaft, a bearing assembly supporting the drive shaft, and a rotor coupled to the drive shaft. A vacuum barrier member is positioned between the rotor and the stator. Multi-axis motor drive assemblies, multi-axis robot apparatus, electronic device manufacturing systems, and methods of assembling drive assemblies are described, as are numerous other aspects.
Inventors:
Clemmerman, Izya
Application Number:
JP2015545192A
Publication Date:
August 29, 2018
Filing Date:
November 26, 2013
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H02K5/124; B25J9/06; B25J19/00; H01L21/677; H02K5/10; H02K7/20
Domestic Patent References:
| JP2001112223A | ||||
| JP2008530970A | ||||
| JP2000069741A | ||||
| JP2012514569A |
Foreign References:
| US20040001750 | ||||
| US7891935 | ||||
| US6669434 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation