Title:
TaC被覆黒鉛部材
Document Type and Number:
Japanese Patent JP7087762
Kind Code:
B2
Abstract:
To provide a novel TaC-coated graphite member having high corrosion resistance against corrosive gas, surface porosity, and high processability.SOLUTION: A TaC-coated graphite member 10 of this invention includes: a base material 20 consisting of isotropic graphite and a Tac coating film 30 formed on a surface of the base material 20. The TaC coating film 30 is formed of a laminate having a first layer 32 to an n-th layer 34 (n≥2) with relative density of Rto Rand thickness of tto t. The relative density Rof the first layer 32 formed on an interface side between the base material 20 and the TaC coating film 30 is larger than the relative density Rof the n-th layer 34 formed on a front side of the TaC coating film 30. The first layer 32 preferably has the relative density Rof 95% or more and the thickness tof 10 μm or more and 200 μm or less. The n-th layer 34 preferably has the relative density Rof 45% or more and 90% or less and the thickness tof 10 μm or more and 200 μm or less.SELECTED DRAWING: Figure 1
Inventors:
Keisuke Shigeto
Daisuke Nakamura
Daisuke Nakamura
Application Number:
JP2018135404A
Publication Date:
June 21, 2022
Filing Date:
July 18, 2018
Export Citation:
Assignee:
Toyota Central R & D Labs.
International Classes:
C04B41/87; B32B18/00; C01B32/21; C01B32/914; C23C14/24; C23C16/448; C30B23/08; C30B25/12
Domestic Patent References:
JP2011153375A | ||||
JP10245285A | ||||
JP2013075814A | ||||
JP2017052660A | ||||
JP2011074275A | ||||
JP2016157886A | ||||
JP2010248060A | ||||
JP2008019163A |
Foreign References:
WO2006085635A1 |
Other References:
重藤啓輔 他,耐高温・耐高腐食性を有す炭化タンタル被覆黒鉛材の開発,公益社団法人日本セラミックス協会2015年年会講演予稿集,2015年
Attorney, Agent or Firm:
Fumio Hatakeyama