To satisfy a demand for speed control in a gantry type table, for solving the problem that the coating speed has to be raised for obtaining an effective coating area because the starting-up speed has a delay relative to a command speed, and the exclusion distance (traveling distance from the start of coating unitil the time of attaining a coating thickness variation rate satisfying a required specification) is required to be reduced and the contents of the demand related to speed control is becoming severe.
In the method of a cross coupling control and a gain exchange control, only a gain exchange of a central speed controller is carried out, but a gain of a right and left deviation control is increased in acceleration and is decreased after ending of acceleration so that overshoot when arriving at the coating speed is controlled and the unevenness of the speed is controlled thereafter.
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MAEDA KOICHI
TORAY ENG CO LTD
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