TABLE DEVICE AND CONTROL METHOD THEREOF

Title:

TABLE DEVICE AND CONTROL METHOD THEREOF

Document Type and Number:

Japanese Patent JP2006195919

Kind Code:

A

Abstract:

To provide a table device which exactly transfers a positioning object to a target position by suppressing deviation and vibration generated in a table at the time of transfer and a control method thereof.

The table 3 arranged in parallel on the upper side of a bed part 2 moves to a vertical direction (Y direction) along linear guides 40, 50 in accordance with drive of movable parts respectively provided to three linear motors 10, 20, 30. Then, measurement positions E1, E2, E3 by three linear encoders are fed back and thrusts F1, F2, F3 are calculated to drive the movable parts of the respective linear motors 10, 20, 30. Three servo amplifiers which drive the linear motors 10, 20, 30, respectively, transfer the movable parts of the respective linear motors 10, 20, 30 based on the thrusts F1, F2, F3.

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Inventors:

ONISHI KOHEI
AOYAMA TOSHIRO
KAKINUMA YASUHIRO
YOKOI KATSUHIKO

Application Number:

JP2005009472A

Publication Date:

July 27, 2006

Filing Date:

January 17, 2005

Export Citation:

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Assignee:

BROTHER IND LTD

International Classes:

G05D3/12; B23Q5/28; B23Q15/00; B23Q15/12; G03F7/20; H01L21/027

Attorney, Agent or Firm:

Hisashi Yamamoto
Chisato Nakayama

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