Title:
TABULAR COMPACT MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2022075053
Kind Code:
A
Abstract:
To provide a manufacturing method for a tabular compact that can reduce wear of a grindstone used in a surface grinding process.SOLUTION: A tabular compact manufacturing method has a lapping process in which a difficult-to-cut plate-like body is processed to the vicinity of a desired thickness, and a surface grinding process in which the plate-like body surface after the process is surface-ground and processed to a surface with high flatness and high smoothness. B4C abrasive grains of No. 280 (ISO 8486 display) are applied in the lapping process, and a vitrified grindstone containing diamond abrasive grains of No. 7000 (ISO 8486 display) is applied in the surface grinding process. In the manufacturing method, conditions of surface grinding are set to: (a) 1800 rpm for a rotation speed of a spindle equipped with a grindstone attached; (b) +151 to -251 rpm for a rotation speed of a chuck table holding the plate-like body; and (c) 0.05 μm/s for a processing feed speed for relatively moving the grindstone and the plate-like body in a processing feed direction.SELECTED DRAWING: Figure 1
Inventors:
ISHIDA FUMIAKI
Application Number:
JP2020185585A
Publication Date:
May 18, 2022
Filing Date:
November 06, 2020
Export Citation:
Assignee:
SUMITOMO METAL MINING CO
International Classes:
B24B7/04; B24B37/00; B24B37/08; B24D3/00; H01L21/304
Attorney, Agent or Firm:
Ueda Shozo
Koizumi Masahiro
Takeshi Kamei
Koizumi Masahiro
Takeshi Kamei
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