To provide a tactile sensor element capable of measuring shear force with a simple structure.
A tactile sensor element 10 comprises: a substrate 11 having a first opening 111A and a second opening 111B; a support film 12 covering the first opening 111A and the second opening 111B; a first detection section 13A located on the support film 12 and above the first opening 111A; a second detection section 13B located on the support film 12 and above the second opening 111B; and an elastic member 16 located on the first detection section 13A and the second detection section 13B. Each of the first detection section 13A and the second detection section 13B has a piezoelectric laminated part 14. The elastic member 16 covers at least the first detection section 13A, the second detection section 13B, and an area of the support film 12 between the first detection section 13A and the second detection section 13B in a plan view from the thickness direction of the substrate 11. A surface of the elastic member 16 is in parallel with a surface of the substrate 11.
| WO/2015/093065 | PRESSURE DETECTOR AND TOUCH PANEL PROVIDED WITH PRESSURE DETECTOR |
| JP2015198154 | PIEZOELECTRIC ELEMENT |
| JP2002162299 | PIEZOELECTRIC VIBRATOR AND PIEZOELECTRIC VIBRATION SYSTEM |
MURAKAMI KENJI
NISHIWAKI MANABU
