Title:
TAPE FOR MANUFACTURING SEMICONDUCTOR AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2010238852
Kind Code:
A
Abstract:
To provide a tape for manufacturing a semiconductor, which has excellent balance between low-temperature adhesion and solubility into an alkaline solvent, and to provide a method for manufacturing a semiconductor device.
The tape 1 for manufacturing a semiconductor includes a first layer 11 including resin having a polyimide frame and a second layer 12 formed on the first layer 11 and including a pressure sensitive adhesive or adhesive, wherein the storage elastic modulus of the second layer 12 at 25°C is 105 Pa or more and 107 Pa or less, and the first layer 11 and the second layer 12 are soluble in an alkaline solvent (40°C) containing 28.2 wt.% of potassium hydroxide, 33.7 wt.% of monoethanolamine, and 38.1 wt.% of water.
Inventors:
ITO TOMOAKI
KODAMA YOICHI
KODAMA YOICHI
Application Number:
JP2009084237A
Publication Date:
October 21, 2010
Filing Date:
March 31, 2009
Export Citation:
Assignee:
MITSUI CHEMICALS INC
International Classes:
H01L21/301; C09J5/00; C09J7/00; C09J11/08; C09J133/04; C09J163/00; C09J179/08; C09J201/00; H01L21/304; H01L23/50
Domestic Patent References:
JPH05301981A | 1993-11-16 | |||
JPH09266183A | 1997-10-07 | |||
JP2006161038A | 2006-06-22 | |||
JP2005064108A | 2005-03-10 | |||
JP2006312268A | 2006-11-16 | |||
JP2001305750A | 2001-11-02 | |||
JP2007294681A | 2007-11-08 |
Foreign References:
WO2008015759A1 | 2008-02-07 |
Attorney, Agent or Firm:
Shinji Hayami
Koji Sato
Koji Sato
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