Title:
テープ貼り機
Document Type and Number:
Japanese Patent JP4676247
Kind Code:
B2
Inventors:
Yasuhiro Masuda
Hitoshi Hoshino
Hitoshi Hoshino
Application Number:
JP2005146814A
Publication Date:
April 27, 2011
Filing Date:
May 19, 2005
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/683; H01L21/301
Domestic Patent References:
JP10305420A | ||||
JP10233430A | ||||
JP6351244A | ||||
JP200345943A | ||||
JP200463644A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki