To provide a device and a method for operating a thermal actuator of a microelectro mechanical device such as a liquid drop emitter.
This thermal actuator of the microelectro mechanical device is provided with a base component and a cantilever component having a thermo-mechanical bender part extending from the base component and a free end tip on a first position. The thermo-mechanical bender part is provided with a base end width adjacent to a base end and the base component, and a free end width adjacent to a free end and the free end tip. The base end width is substantially larger than the free end width. A device adapted for directly applying a thermal pulse having a spatial pattern to the thermo-mechanical bender part is provided. The thermal pulse has a spatial thermal pattern which results in base end temperature increase greater than free end temperature increase of the thermo-mechanical bender part. The high-speed heating of the thermo-mechanical bender part deflects the free end tip of the cantilever component to a second position.
| JP2010208120 | LIQUID JETTING APPARATUS |
| JPH0623998 | LIQUID FOR JETTING DEVICE |
| JPS606469 | DRIP OPERATION TYPE PRINTING MECHANISM |
FURLANI EDWARD P
LEBENS JOHN A
TRAUERNICHT DAVID P
CABAL ANTONIO
ROSS DAVID S
POND STEPHEN F
| JPH0852673A | 1996-02-27 | |||
| JP2002052499A | 2002-02-19 |
Shinsuke Onuki
Tadashige Ito
Masafumi Nakamura
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