Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
TARGET MATERIAL FOR FORMING CARBON FILM
Document Type and Number:
Japanese Patent JPH10212571
Kind Code:
A
Abstract:

To provide a target material for forming a carbon film capable of stably forming the carbon protective film which is homogeneous and excellent in hardness with excellent yield for a long time by sputtering.

A target material is formed of glass-like carbon sheet of the crystalline properties in which the difference in the mean lattice surface clearance d002 of the graphite hexagonal network layer is ≤0.01nm, the difference in the crystal size Lc(002) is ≤1.5nm at a surface layer part and a center part. Preferably, the value of the mean lattice surface clearance d002 of the graphite hexagonal network layer at the center part is 0.345-0.365nm, and the crystalline size Lc(002) is 1.3-4.0nm.


Inventors:
HATA TOMIO
Application Number:
JP3130697A
Publication Date:
August 11, 1998
Filing Date:
January 30, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKAI CARBON KK
International Classes:
C04B35/52; C01B31/02; C23C14/34; (IPC1-7): C23C14/34; C01B31/02; C04B35/52
Attorney, Agent or Firm:
Fukuda Yasuo (1 person outside)