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Patent Searching and Data


Title:
TARGET FOR SPUTTERING AND PRODUCTION OF BLACK MATRIX FOR COLOR FILTER USING THE SAME
Document Type and Number:
Japanese Patent JP2000319777
Kind Code:
A
Abstract:

To produce a target for sputtering in which the generation of pinholes frequently occuring in sputtering in the initial stage of exchanging the target in particular is suppressed, and to provide a method for producing a black matrix for a color filter using the same.

In a target having an erosion region 13 and non-erosion regions 11 and 12 in the surface, and the non-erosion regions 11 and 12 are present respectively at the center part and outer circumferential part of the target surface, at least the target material in the non-erosion region 11 at the center part has been removed. By using this target, a black matrix can be produced on a substrate by sputtering.


Inventors:
YOSHIDA KAZUAKI
ITO MASAKI
Application Number:
JP12616899A
Publication Date:
November 21, 2000
Filing Date:
May 06, 1999
Export Citation:
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Assignee:
STI TECHNOLOGY KK
International Classes:
G02B5/20; C23C14/34; G02F1/1335; (IPC1-7): C23C14/34; G02B5/20
Attorney, Agent or Firm:
Toshikazu Fukai