Title:
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATOR, AND PRODUCTION METHOD OF ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2022080420
Kind Code:
A
Abstract:
To provide a target supply device capable of suppressing failure of an EUV light generator by shortening a period in which droplets are in an unstable state.SOLUTION: A target supply device 40 comprises: a tank 41 for storing a target substance; a pressure adjustment tool 43 for adjusting a pressure in the tank; a filter 51a for filtering the target substance in the tank; and a nozzle 42 for discharging droplets of the target substance which passed through the filter. The target supply device comprises: a droplet detector for detecting discharge of the droplets from the nozzle; and a processor 120 for controlling the pressure adjustment tool so that a pressure increase speed of the pressure in the tank becomes faster after detection of discharge of the droplets than before detection of discharge of the droplets, in a period until the pressure in the tank increases to a target pressure from a pressure at which the discharge of the droplets is detected for the first time since installation of the target supply device, by a target sensor.SELECTED DRAWING: Figure 3
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Inventors:
YAMAZAKI KOJI
IWAMOTO FUMIO
IWAMOTO FUMIO
Application Number:
JP2020191478A
Publication Date:
May 30, 2022
Filing Date:
November 18, 2020
Export Citation:
Assignee:
GIGAPHOTON INC
International Classes:
G03F7/20; H05G2/00
Attorney, Agent or Firm:
Yasuo Morimura