Title:
紫外光発生用ターゲット及びその製造方法
Document Type and Number:
Japanese Patent JP6622009
Kind Code:
B2
Abstract:
A target for ultraviolet light generation 20A includes a sapphire substrate 21 that transmits ultraviolet light UV, an interlayer 22 that is in contact with the sapphire substrate 21, includes oxygen atoms and aluminum atoms in a composition, and transmits ultraviolet light UV, and a luminous layer 23 that is provided on the interlayer 22, includes oxide crystals containing rare earth elements to which an activator agent is added, and receives electron beams EB so as to generate ultraviolet light UV.
More Like This:
Inventors:
Kohei Ikeda
Norio Ichikawa
Hiroyuki Taketomi
Norio Ichikawa
Hiroyuki Taketomi
Application Number:
JP2015118186A
Publication Date:
December 18, 2019
Filing Date:
June 11, 2015
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01J63/06; H01J9/22
Domestic Patent References:
| JP2012199174A |
Foreign References:
| US20140048721 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Shotaro Terasawa
Yoshiki Kuroki
Kenichi Shibayama
Shotaro Terasawa