Title:
ティーチング方法、搬送システム及びプログラム
Document Type and Number:
Japanese Patent JP7399035
Kind Code:
B2
Abstract:
There is provided a teaching method for a transfer device configured to transfer a substrate between a transfer source object and a transfer destination object on which the substrate is disposable. The teaching method includes: generating three-dimensional image data of a shape of the transfer source object, a shape of the transfer destination object, and a state of the substrate based on captured image data of the transfer source object, the transfer destination object, and the substrate captured by a capturing unit, and based on design data of the transfer source object, the transfer destination object, and the substrate; and teaching the transfer device based on the three-dimensional image data so that the substrate is transferred between the transfer source object and the transfer destination object without colliding with the transfer source object and the transfer destination object.
Inventors:
Masakazu Yamamoto
Tadashi Enomoto
Yuta Kunitake
Yuta Matsuhashi
Tadashi Enomoto
Yuta Kunitake
Yuta Matsuhashi
Application Number:
JP2020107705A
Publication Date:
December 15, 2023
Filing Date:
June 23, 2020
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/68; H01L21/02
Domestic Patent References:
| JP2015054378A | ||||
| JP6203166A | ||||
| JP2010056469A | ||||
| JP2015199155A | ||||
| JP2015093345A |
Foreign References:
| US5822498 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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