Title:
温度調節システムおよびこれを用いた荷電粒子ビーム描画装置
Document Type and Number:
Japanese Patent JP5469438
Kind Code:
B2
Inventors:
Seiichi Nakazawa
Application Number:
JP2009264413A
Publication Date:
April 16, 2014
Filing Date:
November 19, 2009
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; F25B21/02; F25B25/00
Domestic Patent References:
| JP2002031428A | ||||
| JP2006153429A | ||||
| JP2010219516A | ||||
| JP2006080194A | ||||
| JP2009063195A | ||||
| JP48072742A | ||||
| JP2006093428A | ||||
| JP62096840U | ||||
| JP2006153373A | ||||
| JP11201569A |
Foreign References:
| WO1998045651A1 |
Attorney, Agent or Firm:
Atsuko Oaku
Hajime Yamashita
Hajime Yamashita