Title:
TEMPERATURE CONTROL SYSTEM FOR LOW-TEMPERATURE OF ELECTRODE IN VACUUM DEVICE USING REFRIGERATOR IN APPARATUS FOR PRODUCING SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPH05163096
Kind Code:
A
Abstract:
PURPOSE:To obtain a temperature control system for low temperatures of a high-frequency, a microwave, a DC or an AC electrode of a vacuum device using a refrigerator in an apparatus for producing a semiconductor by using a simple apparatus. CONSTITUTION:A refrigerant of a refrigerator 7 is directly circulated to an electrode (cathode) 2 so as to cool a high-frequency, a DC or the AC electrode 2 of a vacuum device using the refrigerator T in an apparatus for producing semiconductors. A supply valve 5 for controlling the flow rate and a bypass valve 6 for performing operation reverse to that of the supply valve are installed and the valves are controlled under the PID control of a thermometer 10. Thereby, the accurate temperature control with excellent thermal efficiency can be carried out.
Inventors:
FUKUYAMA TOSHIHIKO
TSUJI TAKASHI
ONO MASANORI
SUZUKI AKIRA
YANO HIROSHI
ISHIMARU YASUSHI
TSUJI TAKASHI
ONO MASANORI
SUZUKI AKIRA
YANO HIROSHI
ISHIMARU YASUSHI
Application Number:
JP32777491A
Publication Date:
June 29, 1993
Filing Date:
December 11, 1991
Export Citation:
Assignee:
APPLIED MATERIALS JAPAN
FUJITSU LTD
FUJITSU LTD
International Classes:
C23C14/54; C30B25/02; C30B25/12; H01L21/302; H01L21/3065; H01L21/31; H05H1/16; (IPC1-7): C23C14/54; C30B25/02; C30B25/12; H01L21/302; H01L21/31; H05H1/16
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)