Title:
TEMPERATURE CONTROLLER AND HEAT TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2002108411
Kind Code:
A
Abstract:
To provide a temperature controller where the occurrence of overshoot at the time of a response to disturbance is suppressed and to provide a heat treatment device using the controller.
When disturbance occurs, a holding signal is outputted to a PID controller 3 for a prescribed period in response to a disturbance trigger signal. The PID controller 3 receives the holding signal, holds an integral operation and continuously outputs integral output which is just before.
Inventors:
MINAMINO IKUO
NARIMATSU KIYONARI
ANDO KOSAKU
NARIMATSU KIYONARI
ANDO KOSAKU
Application Number:
JP2000303206A
Publication Date:
April 10, 2002
Filing Date:
October 03, 2000
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
H05B3/00; G05B11/32; G05B11/36; G05B11/42; G05B13/02; G05D23/19; H01L21/205; (IPC1-7): G05B13/02; G05B11/32; G05B11/36; G05B11/42; G05D23/19; H01L21/205; H05B3/00
Attorney, Agent or Firm:
Kazuhide Okada
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