Title:
TEMPERATURE DIFFERENCE DETECTING CELL AND FINGERPRINT THERMOGRAPH READER USING IT
Document Type and Number:
Japanese Patent JP2004033610
Kind Code:
A
Abstract:
To provide a temperature difference detecting cell and a fingerprint thermograph reader using it.
Each one detecting cell is so constructed that a silicon substrate, a field oxide layer as a thermal insulating structure on the silicon substrate and at least one thermo-couple are arranged in series. The structure includes a thermopile where a heat contact area is located in the central part of the field oxide layer and a cold contact area is located on the thin oxide layer in the periphery of the field oxide layer, and a heat pipe structure having at least one conductor wiring layer and at least one via hole metallic plug, which is formed between the central part of the field oxide layer and an outermost protective layer.
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Inventors:
JOU JENG-SAN
TEI GENI
SHU KEIFUKU
SAI MEIRIN
TEI GENI
SHU KEIFUKU
SAI MEIRIN
Application Number:
JP2002197279A
Publication Date:
February 05, 2004
Filing Date:
July 05, 2002
Export Citation:
Assignee:
LIGHTUNING TECH INC
International Classes:
G01K7/02; A61B5/117; G06T1/00; H01L21/822; H01L27/04; H01L35/28; H01L35/32; (IPC1-7): A61B5/117; G01K7/02; G06T1/00; H01L21/822; H01L27/04; H01L35/28; H01L35/32
Attorney, Agent or Firm:
Matsuji Takemoto
Hideo Sugiyama
Koichi Yuda
Uozumi Takahiro
Naohiko Teshima
Hideo Sugiyama
Koichi Yuda
Uozumi Takahiro
Naohiko Teshima
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