Title:
温度不感性シリコン発振器及びそれから形成された精密電圧基準
Document Type and Number:
Japanese Patent JP4343273
Kind Code:
B2
Abstract:
Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope. Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope, resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage.
Inventors:
Weinberg, Mark, S.
Ward, Paul, A.
Coree Penis, Anthony, S.
Ward, Paul, A.
Coree Penis, Anthony, S.
Application Number:
JP53699198A
Publication Date:
October 14, 2009
Filing Date:
February 24, 1998
Export Citation:
Assignee:
The Charles Stark Draper Laboratory Incorporated
International Classes:
H03B5/30; G01C19/574; H03H9/02; H03H9/24; H03L1/02; H03L7/099
Domestic Patent References:
| JP2223818A | ||||
| JP8054240A | ||||
| JP58097903A | ||||
| JP2241189A |
Foreign References:
| WO1995021383A1 |
Attorney, Agent or Firm:
Teruo Akimoto