Title:
TEMPERATURE MEASUREMENT TUBE AND TEMPERATURE MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2022107143
Kind Code:
A
Abstract:
To provide a temperature measurement tube capable of surely measuring the in-furnace temperature of heat treatment equipment for a long time.SOLUTION: A temperature measurement tube comprises: a graphite tube at least a part of which is arranged in a furnace; a first cap 112 which seals one end of the graphite tube; a second cap 122 which is provided at the other end of the graphite tube and has an opening which serves as an observation window; and a transparent plate 123 which seals the observation window. A radiation thermometer 300 measures via the transparent plate 123, the temperature of the first cap 112 located at a measuring position in the furnace. The graphite tube comprises a gas blowing hole 121a for blowing the inert gas into the inside of the graphite tube, and the inert gas is blown into the inside of the graphite tube to create positive pressure inside the graphite tube graphite tube.SELECTED DRAWING: Figure 1
Inventors:
TODA SHINJIRO
SUZUKI HIRONAGA
GAMA YUICHI
GOTO NOBUMOTO
SUZUKI HIRONAGA
GAMA YUICHI
GOTO NOBUMOTO
Application Number:
JP2021001894A
Publication Date:
July 21, 2022
Filing Date:
January 08, 2021
Export Citation:
Assignee:
NIPPON ELECTRODE KK
International Classes:
G01J5/53; F27D21/00
Attorney, Agent or Firm:
Mitsuharu Kiuchi
Koichi Okuma
Sadanori Katagiri
Kanako Kiuchi
Koichi Okuma
Sadanori Katagiri
Kanako Kiuchi