Title:
TEMPERATURE MEASURING METHOD AND METHOD AND APPARATUS FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2003139618
Kind Code:
A
Abstract:
To provide a surface temperature measuring method capable of accurately calculating the emissivity of a measuring object and capable of knowing an accurate temperature by a pyrometer.
The surface temperature measuring method has a process for measuring the radiation intensity of the certain part A of the measuring object by the pyrometer in such a state that the temperature of the part A is constant and a process for calculating the temperature of a part other than the part A. The emissivity of the part A is led out by performing the calculation of the heat balance A to determine the temperature of the part A.
Inventors:
NOZAWA KATSUYA
SAITO TORU
AOKI NARITSUYO
SAITO TORU
AOKI NARITSUYO
Application Number:
JP2001339104A
Publication Date:
May 14, 2003
Filing Date:
November 05, 2001
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01J5/10; G01J5/00; G01J5/02; H01L21/66; (IPC1-7): G01J5/10; G01J5/02; H01L21/66
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)
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