Title:
温度再現性及びインサイチューシャワーヘッド温度監視
Document Type and Number:
Japanese Patent JP7084707
Kind Code:
B2
Abstract:
Embodiments described herein generally related to a substrate processing apparatus, and more specifically to an improved showerhead assembly for a substrate processing apparatus. The showerhead assembly includes a chill plate, a gas plate, and a gas distribution plate having a top surface and a bottom surface. A plurality of protruded features contacts the top surface of the gas distribution plate. A fastener and an energy storage structure is provided on the protruded features. The energy storage structure is compressed by the fastener and axially loads at least one of the protruded features to compress the chill plate, the gas plate and the gas distribution plate.
Inventors:
Timothy Joseph Franklin
Stephen E Babayan
Philip Alan Klaus
Stephen E Babayan
Philip Alan Klaus
Application Number:
JP2017195675A
Publication Date:
June 15, 2022
Filing Date:
October 06, 2017
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/3065
Domestic Patent References:
| JP2010524205A | ||||
| JP2008235337A |
Foreign References:
| US20090032189 | ||||
| WO2005024928A1 |
Attorney, Agent or Firm:
Yoshiaki Anzai