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Title:
TEST DEVICE
Document Type and Number:
Japanese Patent JP2012141197
Kind Code:
A
Abstract:

To provide a test device that is in contact with both front and rear faces of a wafer.

A test device for testing an electronic device formed on a wafer includes: a stage having an elastic layer on which the wafer is placed, and a plurality of protrusions provided on the elastic layer and electrically connected to an electrode pad formed on the rear face of the wafer; and a fixing member for fixing the wafer on the stage. The test device is provided in which the plurality of protrusions are made to sink into the elastic layer and faces around the plurality of the protrusions come into contact with the rear face of the wafer when the wafer is fixed by the fixing member.


Inventors:
OGASA SHIGE
AKUTSU MASAHIKO
Application Number:
JP2010293409A
Publication Date:
July 26, 2012
Filing Date:
December 28, 2010
Export Citation:
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Assignee:
ADVANTEST CORP
International Classes:
G01R31/28; H01L21/66
Domestic Patent References:
JP2004273985A2004-09-30
JPH05206233A1993-08-13
JP2006337247A2006-12-14
JPH0414933Y21992-04-03
JPH05333098A1993-12-17
JP2001326261A2001-11-22
JP2001077180A2001-03-23
Attorney, Agent or Firm:
Longhua International Patent Service Corporation