Title:
TESTING DEVICE AND TESTING METHOD
Document Type and Number:
Japanese Patent JP2009162723
Kind Code:
A
Abstract:
To provide a testing device and testing method for finding abnormalities of the needle of a probe.
This testing device comprises a substrate-mounting stand 5, a probe card 7 having the probe 8 for providing a test signal to a wafer W mounted on the substrate mounting stand 5, an imaging section 4 for acquiring an image of the probe 8, and a determination section 9 for determining whether the needle of the probe 8 is abnormal, based on difference in image of the probe 8 before and after testing.
Inventors:
SUGANO YOJIRO
Application Number:
JP2008003118A
Publication Date:
July 23, 2009
Filing Date:
January 10, 2008
Export Citation:
Assignee:
FUJITSU MICROELECTRONICS LTD
International Classes:
G01R31/28; H01L21/66
Domestic Patent References:
JP2002176079A | 2002-06-21 | |||
JP2001326258A | 2001-11-22 | |||
JP2005175154A | 2005-06-30 | |||
JP2006128452A | 2006-05-18 | |||
JP2006049599A | 2006-02-16 | |||
JP2002026089A | 2002-01-25 |
Attorney, Agent or Firm:
Keizo Okamoto
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