TESTING METHOD AND APPARATUS OF FUNCTION IN FINE STRUCTURE ELEMENT

Title:

TESTING METHOD AND APPARATUS OF FUNCTION IN FINE STRUCTURE ELEMENT

Document Type and Number:

Japanese Patent JP3759059

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a method and an apparatus for testing the function of a fine structure element.
SOLUTION: The is a method and an apparatus for testing the function of a fine structure element. The fine structure element is excited to test the release and/or mechanical properties, and particles that are released or reflected by the fine structure element are detected and evaluated.

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Inventors:

Macias Brunner
Hans Peter Feuerbaum
Jurgen Frosien

Application Number:

JP2002080163A

Publication Date:

March 22, 2006

Filing Date:

June 24, 1996

Export Citation:

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Assignee:

ETEC SYSTEMS,INCORPORATED

International Classes:

G01R31/26; B81C99/00; G01R31/302; G01M11/00; G01R31/305; G09G3/00; H01J9/42; H01L21/66; H01L29/66; H01S5/00; (IPC1-7): G01R31/302; B81C5/00; H01L21/66; H01L29/66; H01S5/00

Domestic Patent References:

JP61039596A

Attorney, Agent or Firm:

Kenho Ikeda

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