To reduce signal distortion due to wiring between a TFT drive circuit and a prober, and in the prover in constitution, such that the TFT drive circuit is arranged outside the prober.

The TFT drive circuit is divided into a digital circuit portion and an analog circuit portion, the TFT drive digital circuit portion is arranged outside the prover, and the TFT drive analog circuit portion is arranged inside the prover; and the influence of wiring between the TFT drive circuit and prober and in the prover on analog signals is reduced by making a serial communication connection between the TFT drive digital circuit portion arranged outside and the TFT drive analog circuit portion arranged in the inside. A TFT array inspecting device 1 is equipped with a TFT drive digital circuit portion 3, which outputs digital serial data of a TFT drive pattern outside the prover 2 and a plurality of TFT drive analog circuit portions 4 which output analog inspection signals of the TFT drive patterns inside the prober 2, and both the circuits are connected by serial communication 20.