Title:
THERMAL INFRARED DETECTING ELEMENT AND ITS MANUFACTURING METHOD, AND IMAGE PICKUP DEVICE EQUIPPED THEREWITH
Document Type and Number:
Japanese Patent JP3691395
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a thermal infrared detecting element which has inexpensive and simple constitution and can stabilize its element resistance.
SOLUTION: After a heat resistance variation film 3 which is made of an oxide film containing oxide of transition metal and absorbs infrared rays to vary in resistance value is formed in a mixed gas atmosphere of oxygen and inert gas, a conductive protection film 4 having at least its surface made of metal is formed covering the heat resistance variation film 3 and then processed. In the thermal infrared detecting element thus obtained, the heat resistance variation film 3 and the conductive protection film 4 which covers the connection part of the heat resistance variation film 3 for a wiring metal film 5 and has at least its surface made of metal are arranged at the connection part of the wiring metal film 5 connected to the heat resistance variation film 3.
Inventors:
Deguchi Haruhiko
Yoshioka Tomoyoshi
Tomohisa Koda
Yoshioka Tomoyoshi
Tomohisa Koda
Application Number:
JP2001012441A
Publication Date:
September 07, 2005
Filing Date:
January 19, 2001
Export Citation:
Assignee:
Sharp Corporation
International Classes:
G01J1/02; G01J5/02; G01J5/20; G01J5/48; H01L27/14; H04N5/33; (IPC1-7): G01J1/02; G01J5/02; G01J5/48; H01L27/14; H04N5/33
Domestic Patent References:
| JP11074545A | ||||
| JP8128889A | ||||
| JP57186130A | ||||
| JP56004205A |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office
Kenzo Hara
Kenzo Hara
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