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Title:
THERMAL INFRARED DETECTION ELEMENT
Document Type and Number:
Japanese Patent JPH11112038
Kind Code:
A
Abstract:

To provide a thermal infrared detection element which improves an effective absorption rate and can improve response speed and sensitivity.

The detection element is provided with a substrate 1, a membrane 10 formed on the main face of the substrate 1, a heat separation area 11 formed by removing a part of a semiconductor at the lower part of the membrane 10, a thermo-pile 15 formed in the membrane and a pair of reflection mirrors (total reflection mirror 21 and semi-reflection mirror 22) which face each other so that at least a part of an infrared absorption film 4 is arranged on an optical axis.


Inventors:
HIROTA MASAKI
Application Number:
JP26526697A
Publication Date:
April 23, 1999
Filing Date:
September 30, 1997
Export Citation:
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Assignee:
NISSAN MOTOR
International Classes:
G01J1/02; G01J5/02; G01J5/12; G01J5/14; H01L35/32; (IPC1-7): H01L35/32; G01J1/02; G01J5/02