Title:
高出力ＲＦ ＭＥＭＳスイッチでの熱管理
Document Type and Number:
Japanese Patent JP6858186
Kind Code:
B2
Abstract:
The present disclosure generally relates to a mechanism for making a MEMS switch that can switch large electrical powers. Extra landing electrodes are employed that provide added electrical contact along the MEMS device so that when in contact current and heat are removed from the MEMS structure close to the hottest points.
Inventors:
Robertus Petrus van Kampen
Richard El Naipe
Richard El Naipe
Application Number:
JP2018525367A
Publication Date:
April 14, 2021
Filing Date:
November 14, 2016
Export Citation:
Assignee:
CAVENDISH KINETICS, INC.
International Classes:
H01H59/00; B81B3/00; H01H11/00
Domestic Patent References:
| JP2016531435A | ||||
| JP2016521454A |
Attorney, Agent or Firm:
Takuji Yamada
Haruo Nakano
Mikio Takeuchi
Haruo Nakano
Mikio Takeuchi