Title:
THERMAL PRINTING HEAD AND PRODUCTION THEREOF
Document Type and Number:
Japanese Patent JP3225317
Kind Code:
B2
Abstract:
PURPOSE: To provide a heating part protective film having sufficient wear resistance and adhesion to keep a superior printing performance for a long time by a method wherein the protective film for covering a heating part is made of four layers gradually increasing in hardness from a primary layer to a surface layer.
CONSTITUTION: An intermediate composed of a glass glazing heat accumulation layer 2, a resistor layer 3, and a conductor layer 4 provided on a substrate 1 in this order is set in a device and a vacuum is drawn. After that, electricity is conducted only to a silicon oxide target under an argon gas atmosphere to form a first layer 6 of a silicon oxide. Succeedingly, electricity is also conducted to a SiAlON target to form a second layer of a mixture film of a silicon oxide and a SiAlON. Next, the electric conduction to the silicon oxide target is stopped and the electric conduction to the SiAlON target is continued, whereby a third layer 8 of a SiAlON is formed on the second layer 7. A nitrogen gas is led into a sputtering firm-forming device, and a partial pressure is raised to a predetermined value. Thereafter, the electric conduction to the SiAlON target is restarted to overlap a fourth layer 9 of a nitrogen-added SiAlON film on the third layer 8.
Inventors:
Haruhiko Yamashita
Application Number:
JP34155091A
Publication Date:
November 05, 2001
Filing Date:
December 24, 1991
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
B41J2/335; (IPC1-7): B41J2/335
Domestic Patent References:
| JP315562A | ||||
| JP2172758A | ||||
| JP6475264A | ||||
| JP61237492A | ||||
| JP1202465A | ||||
| JP2238956A |
Attorney, Agent or Firm:
Minoru Yoshida (1 person outside)