Title:
プラズマ処理装置用部品の溶射方法及びプラズマ処理装置用部品
Document Type and Number:
Japanese Patent JP7224096
Kind Code:
B2
Abstract:
There is provision of a thermal spraying method of a component for a plasma processing apparatus performed by a plasma spraying apparatus including a nozzle and a plasma generating unit having a common axis with the nozzle. The method includes a step of injecting, with a plasma generating gas, feedstock powder having a particle diameter of 15 μm or less from a tip of the nozzle to the plasma generating unit, a step of generating a plasma from the plasma generating gas in the plasma generating unit, by using electric power not more than 50 kW, and a step of thermal spraying the feedstock powder liquefied by the plasma at the component through a mask, such that a surface of a resin layer of the component is covered with the feedstock powder.
Inventors:
Yoshiyuki Kobayashi
Application Number:
JP2017137323A
Publication Date:
February 17, 2023
Filing Date:
July 13, 2017
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/683; C23C4/01; C23C4/10; C23C4/11; C23C4/134; H01L21/3065; H05H1/42
Domestic Patent References:
| JP2016539250A | ||||
| JP2010110669A | ||||
| JP2011524944A | ||||
| JP63157850A | ||||
| JP2016065302A | ||||
| JP2008117982A | ||||
| JP2007081218A |
Foreign References:
| WO2014157491A1 | ||||
| US20110091700 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito