Title:
Heat treatment equipment, anomaly detection methods in heat treatment and readable computer storage media
Document Type and Number:
Japanese Patent JP6308967
Kind Code:
B2
Inventors:
Yasuo Mori
Seven Kin
Seven Kin
Application Number:
JP2015065784A
Publication Date:
April 11, 2018
Filing Date:
March 27, 2015
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; H01L21/683
Domestic Patent References:
| JP2012099787A | ||||
| JP2009123816A | ||||
| JP2000306825A | ||||
| JP2008311475A | ||||
| JP2010087343A | ||||
| JP2011249657A | ||||
| JP2008032697A | ||||
| JP3169006A | ||||
| JP8148417A | ||||
| JP2006013445A | ||||
| JP2002050557A | ||||
| JP2012151247A |
Foreign References:
| WO2010038674A1 | ||||
| US20110283940 |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Naoki Ogita
Miaki Kametani
Koji Hagiwara
Naoki Ogita
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