Title:
Thermal treatment equipment
Document Type and Number:
Japanese Patent JP6177616
Kind Code:
B2
Inventors:
Yuya Nakanishi
Katsuhisa Kasatsu
Kenji Iwano
Yoshihiko Urasaki
Shinichi Ikeda
Katsuhisa Kasatsu
Kenji Iwano
Yoshihiko Urasaki
Shinichi Ikeda
Application Number:
JP2013160255A
Publication Date:
August 09, 2017
Filing Date:
August 01, 2013
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
F27D7/02; F27B17/00; H01L21/324
Domestic Patent References:
| JP2001012870A | ||||
| JP2007263532A | ||||
| JP5073500U | ||||
| JP62054431A | ||||
| JP2002195762A |
Attorney, Agent or Firm:
Patent Corporation Wandee ip Partners
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