Title:
熱的に安定したルテニウム前駆体組成物及びルテニウム含有膜の形成方法
Document Type and Number:
Japanese Patent JP2023545734
Kind Code:
A
Abstract:
本願は、熱安定性の高い膜形成用ルテニウム前駆体化合物、前記ルテニウム前駆体化合物を含む膜形成用前駆体組成物、及び前記膜形成用前駆体を利用してルテニウム－含有膜を形成する方法に関する。
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Inventors:
Ko, Won Young
Kim, Jin Chic
Kim, Daeyoung
Kim, Jin Chic
Kim, Daeyoung
Application Number:
JP2023521347A
Publication Date:
October 31, 2023
Filing Date:
October 12, 2021
Export Citation:
Assignee:
UP Chemical Company Limited
International Classes:
C23C16/18; C07F15/00; C23C16/455
Attorney, Agent or Firm:
Katsufumi Mizuno
Makoto Ide
Hiroshi Suzawa
Yosuke Hisamatsu
Makoto Ide
Hiroshi Suzawa
Yosuke Hisamatsu
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