PURPOSE: To measure the thickness without bus line errors by measuring radiation intensity which transmits through an object to be measured, using the memorized value of the data of the intensity variation with respect to a reference surface of the object to be measured, and performing computation proccessing.
CONSTITUTION: The radiation (γ) 13 generated in a radiation source 11 transmits through the object to be measured 15 and enters a detector 17. The detected signal 19 is inputted into a computation processor 25 through an AD converter 21. Meanwhile a measured digital signal 23 from a reference body whose thickness t1 is known is sent to the computation processor 25. A signal 57, which corresponds to a displacement quantity Δl from a reference position of the bus line l and is obtained by a displacement gage 55 is supplied to an X address terminal 65 of a memory 63 through an AD converter 59. A signal 27 corresponding to t1 from the computation processor 25 is suppied to a Y address terminal 67. A signal corresponding to t1 is sent to the computation processor 25 from a controller 51. The data signals from the computation processor 25 and the memory 63 are set to an operator 31, and the thickness without the bus line errors is computed and displayed 35.
OKAMOTO EISUKE
INAGAKI SEIZOU
| JPS5342762A | 1978-04-18 | |||
| JPS5499664A | 1979-08-06 |