PURPOSE: To excellently form a diamondlike carbon thin film rich in uniformity by erecting plural sheets on the inner wall of the reaction tube to be supplied with gas.
CONSTITUTION: The original sheet 1 of a magnetic recording medium is formed by forming a magnetic film of metallic thin film type on the surface of a substrate. The original sheet 1 is traveled in a vacuum vessel 2 from a feed roll 3a through a cooling can roller 4 and wound on a winding roll 3b. An almost cylindrical quartz reaction tube 5 with the base shaped like a rugby ball is opposed to the roller 4. Annular sheets 9 are erected on the inner wall of the reaction tube 5 to have an interdigital section. A microwave is introduced into the tube 5 through a waveguide 7 to excite plasma, and a magnetic field is impressed by an ECR coil 8 to form a diamondlike carbon thin film as the metallic magnetic film on the original sheet 1 surface. A diamondlike carbon thin film uniform in thickness is formed in this way.
KITAORI NORIYUKI
YOSHIDA OSAMU
MIZUNOYA HIROHIDE
SHIGA AKIRA
