To provide a thin film device suitable for a light and thin display panel without spoiling its robustness, and to maintain and improve the heat resistance and flexibility of a liquid crystal display or an electroluminescence display using them for a drive substrate.

This thin film device is manufactured through a process of adhering a second substrate on a thin film device layer 105 provided on a protective layer (first and second protective layers 103) having a monolayer or a plural-layer structure formed in a first substrate (not shown) with a first adhesive layer (not shown), a process removing or separating all the first substrate through a process including at least one of a chemical treatment and a mechanical polishing processing and a process of removing or separating a second substrate (not shown) after adhering a third substrate 112 on an exposed part of the second protective layer 103 with a second adhesive layer 111. The second protective layer 103 is formed so that a projection image of the second protective layer 103 to a third substrate 112 after the thin film device is completed stays in the third substrate 112 surface.