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Title:
薄膜形成方法および装置
Document Type and Number:
Japanese Patent JP5761724
Kind Code:
B2
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Inventors:
Fumihiko Hirose
Degai
Application Number:
JP2013011476A
Publication Date:
August 12, 2015
Filing Date:
January 24, 2013
Export Citation:
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Assignee:
Fumihiko Hirose
International Classes:
H01L21/316; C23C16/40; H01L21/31
Domestic Patent References:
JP2010507259A
JP2009212303A
JP2009509039A
JP2011246818A
JP2010212371A
JP2011124371A
JP2004023043A
Foreign References:
WO2009041219A1
US20110014770
US20100075507
Attorney, Agent or Firm:
Hiroyuki Kurihara
Mountain Saki Yuichiro



 
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