To greatly improve magnetic and floating characteristics of a thin film magnetic head and to enhance reliability there of in the manufacturing method of thhe head using a giant magneto-resistance(GMR) head or a spin- tunnel magneto-resistance(TMR) head for reproducing.
In the method for machining the floating surface of a thin film magnetic head, a stepped rail is machined in the floating surface by ion milling, and then clustered ion beam machining is performed. Alternatively, the clustered ion beam machining is performed while the magnetic head is attached to a support spring, and assembling to a drive is subsequently performed in a vacuum or atmosphere controlled chamber. Thereby, surface toughness and machining level difference are reduced, and the deterioration of element characteristics caused by damage, corrosion or contamination is prevented. Further, variance in floating amounts is reduced to realize a reduction in the effective floating amount of the head, a magnetic disk device having a recording density higher than that in the conventional case is provided, and the reliability of the magnetic disk device is greatly enhanced.
OCHIAI YUJI
TANAKA HIDEAKI
SASAKI SHINJI
FURUSAWA KENJI
