Title:
薄膜の製造方法、光電子増倍管の製造方法
Document Type and Number:
Japanese Patent JP7042191
Kind Code:
B2
Abstract:
To provide a method for manufacturing a thin film, which can uniformly form a thin film containing a carbon nano tube in an arbitrary part of a curve surface and can obtain the thin film having excellent light transmissivity and conductivity.SOLUTION: A manufacturing method of a thin film, comprises steps of: mounting a coated member 8 that is tightly attached to an inner wall to coat the inner wall in a cylinder transparent substrate 7 having the inner wall containing a curve surface S to which a thin film is provided; adding a fluid dispersion containing a carbon nano tube on a front surface of the curve surface S; rotating the substrate 7 by setting a direction orthogonal to a center axis of the cylindrical substrate 7 as an axial direction of a rotation; coating the front surface of the curve surface S with the fluid dispersion; drying the fluid dispersion; and separating the coated member 8 from the substrate 7.SELECTED DRAWING: Figure 5
Inventors:
Kentaro Miyoshi
Hiroshi Igarashi
Hiroshi Igarashi
Application Number:
JP2018151582A
Publication Date:
March 25, 2022
Filing Date:
August 10, 2018
Export Citation:
Assignee:
Taiyo Nippon Sanso Co., Ltd.
International Classes:
H01J9/12; C01B32/174; H01J43/08
Domestic Patent References:
| JP2008166279A | ||||
| JP2014131960A | ||||
| JP20046197A |
Attorney, Agent or Firm:
Patent Business Corporation Shiga International Patent Office
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