To provide a thin film piezoelectric element, a manufacturing method of the thin film piezoelectric element, a microactuator, a head gimbal assembly, and a disk driving device including the head gimbal assembly.
A thin film piezoelectric element 200 includes: a substrate 201; and a piezoelectric thin film lamination part 210 formed on the substrate 201. The piezoelectric thin film lamination part 210 includes: an upper electrode layer 214; a bottom electrode layer 211; and a piezoelectric layer sandwiched between the upper electrode layer 214 and the bottom electrode layer 211. The piezoelectric layer includes a first piezoelectric layer 212 and a second piezoelectric layer 213, has a phase structure where the compositions of the first piezoelectric layer 212 and the second piezoelectric layer 213 are different, and acquires a high piezoelectric constant, improved strength of a coercive force, and good thermal stability. Thus, a stronger electric field may be applied without causing depolarization and a larger stroke is achieved.
PANJALAK ROKRAKTHONG
HATA KENJIRO
NISHIYAMA KAZUSHI
IIZUKA DAISUKE
IIJIMA ATSUSHI
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