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Title:
THIN-FILM PIEZOELECTRIC RESONATOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2008011140
Kind Code:
A
Abstract:

To provide a thin-film piezoelectric resonator capable of reducing the electrical resistance of electrode, without affecting the resonance characteristics of a resonance part, and to provide a manufacturing method thereof.

The thin-film piezoelectric resonator is provided having a lower electrode 2, an upper electrode 3, and a piezoelectric material film 4 provided between the lower electrode and upper electrode, and is such that at least either of the lower electrode or the upper electrode has hollow portions 5 and 6.


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Inventors:
TAKAYAMA MASAJI
SHIBATA HIRONOBU
KAWAMURA KEIKO
Application Number:
JP2006179108A
Publication Date:
January 17, 2008
Filing Date:
June 29, 2006
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H03H9/17; H01L41/09; H01L41/187; H01L41/22; H01L41/29; H03H3/02
Attorney, Agent or Firm:
Masahiko Hinataji



 
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