To efficiently and effectively diffuse group Ia elements in a light absorbing layer at the time of heat treatment so as to improve energy conversion efficiency in the manufacture of a thin film solar battery in which a back surface electrode is formed on a substrate, a precursor film is formed on the back surface electrode, the light absorbing layer of a CIGS base is prepared by executing the heat treatment in an Se or S atmosphere and a transparent electrode is formed on the light absorbing layer via a buffer layer.
In the manufacturing method, the substrate including the group Ia elements is used, the group Ia elements of the substrate are diffused in the light absorbing layer at the time of the heat treatment and the amount of diffusion is controlled by the back surface electrode. Also, by the manufacturing method, a thin film solar battery is obtained.
AOKI MASASHI
FUTAMURA YUICHI
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